Results on a high efficiency excimer laser operating according to the prepulse-mainpulsetechnique are reported. The laser volume of about 90 cm is X-ray preionized. The mainpulse obtained from a PFN 2 swiched onto the discharge by means of a racetrack saturable inductor (magnetic switching) connected to the laser head with low inductance. Laser output energy has been measured as a function of gas mixture and delay between X-ray and prepulse.
展开▼
